Specialty Glass : Products & Services

Quartz: High Precision Fused Silica Wafers

HOYA offers Quartz Wafers with Standard and Ultra-Parallel surfaces.

Features

  • Dimensional Replica of Standard Silicon Wafers
  • Ultra-Parallel
  • Super Fine Surface Finish
  • High Transmission

Applications

  • Biotech Arrays
  • Photomasks
  • Sensors
  • Telecom
Dimensions
Product Code Diameter (± 0.3mm) Thickness (± 0.05mm) Ori-Flat (± 2.5mm)
4 W 55 100.0 0.525 32.5
5 W 65 125.0 0.625 42.5
6 W 675 150.0 0.675 57.5
Physical Specifications
Standard Products Ultra-Parallel Products
Inclusion None
(@ > 3µm)
None
(@ > 3µm)
Scratch None
(@ > 1µm)
None
(@ > 20µm)
Sleek None
(@ > 3µm)
None
(@ > 30µm)
Pit 0.05 pcs/cm2
(@ > 1-4µm)
0.05 pcs/cm2
(@ > 10-30µm)
Total Thickness Variation - < 3µm
Local Thickness Variation (20mm sq.) - < 0.5µm
Physical Properties
Coefficient of Thermal Expansion 5.0 x 10-7 (50-200°C)
Annealing Point 1,120°C
Optical Properties
Refractive Index (nd) 1.46
Chemical Properties
Wt. loss DI water 0.000% (100°C, 1 hour)
Wt. loss 1/100N HNO3 0.000% (100°C, 1 hour)
Wt. loss 5% NaOH 0.17% (80°C, 1 hour)
Mechanical Properties
Specific Gravity 2.20
Young's Modulus 7,413 Kg/mm2
Sheer Modulus 3,170 Kg/mm2
Poisson's Ratio 0.18
Knoop Hardness 615 Kg/mm2
Lapping Hardness 210
Electrical Properties
Surface Resistivity 1 x 1019 Ω
Bulk 1 x 1018 Ω•cm2

Note: The listed data are standard value. Because of continuous product improvement, the various data listed are subject to change without notice.